Reticle Handling

The Need for a Dedicated ESD Control Document in a Semiconductor Fabrication Environment

Applying back end ESD standards straight into the fab often misses the mark, overcontrolling low risk areas while leaving reticle handling, ionization imbalance, and isolated conductors exposed. Here's why semiconductor fabs need their own ESD guidance document, and how it should work alongside ANSI/ESD S20.20.

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