The International Electrotechnical Commission (IEC) has released IEC 62047-28:2017 . This includes “Semiconductor devices – Micro-electromechanical devices – Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices.” This standard is now available on the IEC webstore.
Description: “IEC 62047-28:2017 specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.”
*Description from the IEC Website.
