A new edition of IEC 62047-21 was published by the International Electrotechnical Committee. IEC 62047-21 applies to “Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson’s ratio of thin film MEMS materials.” The new edition can be published on the IEC website.
Description*
“IEC 62047-21:2014 specifies the determination of Poisson’s ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.”
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*Description from IEC website
